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I am grateful to my advisor, Dr. Don DeVoe, for his encouragement and trust.
I am also indebted to my parents and to my colleagues at the University of Maryland MEMS Lab, especially Fred Rosenberger and Dave Schreiber, for their support, ideas, and good humor.
The fabrication assistance of Nolan Ballew, Tom Laughran, and Brett Piekarski is gratefully acknowledged.
This research was supported under DARPA contract DABT 63-98-10015 and NSF grant DMI 9875817.