TABLE OF CONTENTS

Abstract

Acknowledgements

CHAPTER 1    INTRODUCTION

1.1    Overview

1.2    General Microfabrication Background

1.3    Three Dimensional Microfabrication Background

CHAPTER 2    3DMEMS FABRICATION PROCESS

2.1    Introduction

2.2    Overview of 3DMEMS Process

2.3    3DMEMS Process Flow

2.4    Design Rules and Process Details

2.5    Fabrication Results

2.6    Revised 3DMEMS Process Flow

2.7    Summary

CHAPTER 3    ELECTROTHERMAL ACTUATION

3.1    Introduction

3.2    Electrothermal Analysis

3.3    Thermomechanical Analysis

3.4    Transient Analysis

3.5    Actuator Fabrication

3.6    Experimental Results

3.7    Revised Electrothermal Analysis

3.8    Design Strategy

3.9    Summary

CHAPTER 4    CONCLUSION AND FUTURE WORK

4.1    Conclusion

4.2    3DMEMS Process Refinement

4.3    Electrothermal Motor Integration

APPENDIX A    DESIGN RULES

A.1    Explanation and Origin of Design Rules

APPENDIX B    EQUIPMENT AND PROCESS DETAILS

B.1    Wafer and Photomask Details

B.2    Process Details

APPENDIX C    NUMERICAL SOLUTION OF HEAT EQUATION

C.1    Program Operation

REFERENCES

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